Advanced Scanning Probe Lithography and Its Parallelization

To my beloved families. iv ACKNOWLEDGEMENTS First, I would like to thank my thesis advisor, Dr. Elisa Riedo, for providing me the opportunity to conduct this exciting research. I'm sincerely grateful for her valuable guidance and perpetual encouragement though my entire graduate research. and his group, for the fabrication of thermal cantilevers. their great help and support. v Finally, I would like to thank my families. I wish to thank my parents, for being understanding and supportive. I would also give my thanks to my husband, Jian, for his love.